IP Library Patent Application 60323649
Patent Application Provisional
App. No. 60/323,649 · Confirmation No. 3089

Deposition over mixed substrates using trisilane

Inventor: Michael A. Todd
Provisional Application Expired
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Code Description Pages PDF
2001-09-19 TRNA Transmittal of New Application 2 View
2001-09-19 SPEC Specification 22 View
2001-09-19 CLM Claims 4 View
2001-09-19 ABST Abstract 1 View
2001-09-19 DRW Drawings-only black and white line drawings 5 View
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Quick Facts
App. No.
60/323,649
Filed
2001-09-19