IP Library › Patent Application 10074936
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App. No. 10/074,936 · Confirmation No. 8853

SEMICONDUCTOR DEVICE HAVING INTERCONNECTION IMPLEMENTED BY REFRACTORY METAL NITRIDE LAYER AND REFRACTORY METAL SILICIDE LAYER AND PROCESS OF FABRICATION THEREOF

Inventor: Tetsuya Taguwa
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2002-02-13 TRNA Transmittal of New Application 5 View
2002-02-13 A.PE Preliminary Amendment 2 View
2002-02-13 SPEC Specification 19 View
2002-02-13 CLM Claims 7 View
2002-02-13 ABST Abstract 1 View
2002-02-13 DRW Drawings-only black and white line drawings 6 View
2002-02-13 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/074,936
Filed
2002-02-13
Granted
2003-05-27
Pub. No.
US20020070456A1
Art Unit
2813
PTA
-26 days