IP Library › Granted Patent US 6,721,938
Granted Patent Utility
US 6,721,938 · Confirmation No. 5314

OPTICAL PROXIMITY CORRECTION FOR PHASE SHIFTING PHOTOLITHOGRAPHIC MASKS

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 Code Description Pages PDF
2011-08-19 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-01-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-06 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-10-06 FOR Foreign Reference 16 View
2003-09-24 IDS Information Disclosure Statement (IDS) Form (SB08) 13 View
2003-02-04 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-02-04 FOR Foreign Reference 29 View
2002-02-25 TRNA Transmittal of New Application 1 View
2002-02-25 SPEC Specification 24 View
2002-02-25 CLM Claims 14 View
2002-02-25 ABST Abstract 1 View
2002-02-25 DRW Drawings-only black and white line drawings 28 View
2002-02-25 OATH Oath or Declaration filed 8 View
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Quick Facts
Patent No.
US 6,721,938
App. No.
10/082,697
Filed
2002-02-25
Granted
2004-04-13
Pub. No.
US20020188924A1
Art Unit
2825
PTA
0 days