Patent Application
Provisional
App. No. 60/325,689
· Confirmation No. 4061
Cost functions and gate CD reduction in phase shifting photolithographic masks
Provisional Application Expired
Inventors
Christophe Pierrat
Santa Clara, CA
Michel Luc Cote
San Jose, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 30437
- Docket No.
- NMTI 1002-7
- Confirmation No.
- 4061
Child
Claims priority from a provisional application
→
App. 09/996,973
· US 6,681,379
Filed 2001-11-15
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/809,650
· US 6,861,204
Filed 2004-03-26
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/938,653
· US 7,348,108
Filed 2004-09-10
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/609,928
· US 8,566,757
Filed 2009-10-30
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2002/017667
Filed 2002-06-07
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
Claims priority from a provisional application
→
App. 10/165,550
· US 6,978,436
Filed 2002-06-07
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/085,759
· US 6,787,271
Filed 2002-02-28
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/352,538
· US 8,977,989
Filed 2009-01-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/083,697
· US 7,500,217
Filed 2005-03-17
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/082,697
· US 6,721,938
Filed 2002-02-25
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2002/017668
Filed 2002-06-07
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
Claims priority from a provisional application
→
App. 10/165,557
· US 7,028,285
Filed 2002-06-07
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/799,073
· US 7,312,003
Filed 2004-03-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/939,104
· US 7,435,513
Filed 2004-09-10
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/926,648
· US 7,739,649
Filed 2007-10-29
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-12-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-02-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-05-24
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 60/325,689
- Filed
- 2001-09-28
External Links