Granted Patent
Utility
US 6,787,271
· Confirmation No. 1994
DESIGN AND LAYOUT OF PHASE SHIFTING PHOTOLITHOGRAPHIC MASKS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-08-19 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2005-06-24 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2005-05-13 | COCIN |
Request for Certificate of Correction | 5 | View | |
| 2004-07-07 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2004-07-07 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2004-07-07 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2004-05-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2004-05-10 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-04-19 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2004-04-19 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2004-03-12 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-03-12 | A.NA |
Amendment after Notice of Allowance (Rule 312) | 1 | View | |
| 2004-03-12 | CLM |
Claims | 8 | View | |
| 2004-03-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2004-02-11 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-02-11 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-02-11 | 1449 |
List of References cited by applicant and considered by examiner | 14 | View | |
| 2004-02-11 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-02-11 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-02-11 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-11 | A.PE |
Preliminary Amendment | 1 | View | |
| 2004-02-05 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-12-08 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-12-08 | CLM |
Claims | 9 | View | |
| 2003-12-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-11-17 | CTNF |
Non-Final Rejection | 4 | View | |
| 2003-11-17 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-10-27 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-10-06 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2003-02-03 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 6 | View | |
| 2003-02-03 | FOR |
Foreign Reference | 28 | View | |
| 2002-11-06 | A.PE |
Preliminary Amendment | 1 | View | |
| 2002-11-06 | SPEC |
Specification | 1 | View | |
| 2002-11-06 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2002-11-05 | CFILE |
Request for Corrected Filing Receipt | 3 | View | |
| 2002-07-31 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 13 | View | |
| 2002-02-28 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-02-28 | SPEC |
Specification | 35 | View | |
| 2002-02-28 | CLM |
Claims | 9 | View | |
| 2002-02-28 | ABST |
Abstract | 1 | View | |
| 2002-02-28 | DRW |
Drawings-only black and white line drawings | 24 | View | |
| 2002-02-28 | OATH |
Oath or Declaration filed | 6 | View | |
| 2002-02-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-02-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-02-28 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Michel Luc Cote
San Jose, CA
Christophe Pierrat
Santa Clara, CA
Attorneys & Agents of Record
Classification
USPC
430/5
G03F7/70466
G03F1/26
G03F1/36
G03F1/68
G03F1/70
G03F7/70425
G03F7/70433
G03F7/70558
Prosecution
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- Customer No.
- 197
- Docket No.
- NMTI 1002-6
- Confirmation No.
- 1994
Publication
- Pub. No.
- US20020122994A1
- Pub. Date
- 2002-09-05
Patent Term Adjustment
-219days
Parent
Claims priority from a provisional application
→
App. 60/296,788
Filed 2001-06-08
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/304,142
Filed 2001-07-10
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/325,689
Filed 2001-09-28
· Provisional Application Expired
Parent
is a Continuation in-part of
→
App. 09/669,359
· US 6,503,666
Filed 2000-09-26
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/215,938
Filed 2000-07-05
· Provisional Application Expired
Child
is a Division of
→
App. 11/926,648
· US 7,739,649
Filed 2007-10-29
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Division of
→
App. 12/609,928
· US 8,566,757
Filed 2009-10-30
· Patented Case
Child
PCT
is a Continuation of
→
PCT/US2002/017668
Filed 2002-06-07
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
is a Continuation in-part of
→
App. 10/165,557
· US 7,028,285
Filed 2002-06-07
· Patented Case
Child
is a Division of
→
App. 10/939,104
· US 7,435,513
Filed 2004-09-10
· Patented Case
Child
is a Division of
→
App. 10/799,073
· US 7,312,003
Filed 2004-03-12
· Patented Case
Child
is a Division of
→
App. 10/938,653
· US 7,348,108
Filed 2004-09-10
· Patented Case
Child
is a Continuation in-part of
→
App. 10/165,550
· US 6,978,436
Filed 2002-06-07
· Patented Case
Child
is a Continuation in-part of
→
App. 12/352,538
· US 8,977,989
Filed 2009-01-12
· Patented Case
Child
is a Division of
→
App. 10/809,650
· US 6,861,204
Filed 2004-03-26
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-12-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-02-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-28
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Quick Facts
- Patent No.
- US 6,787,271
- App. No.
- 10/085,759
- Filed
- 2002-02-28
- Granted
- 2004-09-07
- Pub. No.
- US20020122994A1
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- PTA
- -219 days
External Links