IP Library › Granted Patent US 6,509,200
Granted Patent Utility
US 6,509,200 · Confirmation No. 1782

METHOD OF APPRAISING A DIELECTRIC FILM, METHOD OF CALIBRATING TEMPERATURE OF A HEAT TREATMENT DEVICE, AND METHOD OF FABRICATING A SEMICONDUCTOR MEMORY DEVICE

Inventor: Kenichi Koyanagi
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2002-02-27 TRNA Transmittal of New Application 2 View
2002-02-27 ADS Application Data Sheet 3 View
2002-02-27 SPEC Specification 34 View
2002-02-27 CLM Claims 6 View
2002-02-27 ABST Abstract 1 View
2002-02-27 DRW Drawings-only black and white line drawings 8 View
2002-02-27 OATH Oath or Declaration filed 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,509,200
App. No.
10/083,612
Filed
2002-02-27
Granted
2003-01-21
Pub. No.
US20020137239A1
Art Unit
2812
PTA
0 days