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App. No. 10/093,789 · Confirmation No. 1982

NOVEL METHOD TO ACHIEVE INCREASED TRENCH DEPTH, INDEPENDENT OF CD AS DEFINED BY LITHOGRAPHY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-11-02 BIB Bibliographic Data Sheet 1 View
2004-07-26 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-07-26 1449 List of References cited by applicant and considered by examiner 1 View
2004-07-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-13 C.AD Change of Address 1 View
2004-05-18 RUSH Printer Query form, used by the publications branch 1 View
2004-04-21 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-21 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-21 892 List of references cited by examiner 1 View
2004-04-21 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-21 FWCLM Index of Claims 1 View
2004-04-21 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-10 SRNT Examiner's search strategy and results 1 View
2004-03-11 FWCLM Index of Claims 1 View
2004-03-11 WFEE Fee Worksheet (SB06) 1 View
2004-03-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2004-03-01 CLM Claims 5 View
2004-03-01 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-11-28 CTNF Non-Final Rejection 5 View
2003-11-28 892 List of references cited by examiner 1 View
2003-11-28 FWCLM Index of Claims 1 View
2003-11-28 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-14 SRNT Examiner's search strategy and results 1 View
2003-11-13 SRNT Examiner's search strategy and results 1 View
2003-10-15 SRNT Examiner's search strategy and results 2 View
2003-07-24 LET. Miscellaneous Incoming Letter 1 View
2003-06-24 ELC. Response to Election / Restriction Filed 1 View
2003-06-24 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-06-24 LET. Miscellaneous Incoming Letter 2 View
2003-06-24 DRW Drawings-only black and white line drawings 7 View
2003-06-06 CTRS Requirement for Restriction/Election 4 View
2002-03-07 TRNA Transmittal of New Application 4 View
2002-03-07 SPEC Specification 15 View
2002-03-07 CLM Claims 4 View
2002-03-07 ABST Abstract 1 View
2002-03-07 DRW Drawings-only black and white line drawings 7 View
2002-03-07 OATH Oath or Declaration filed 6 View
2002-03-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-03-07 SRFW Search information including classification, databases and other search related notes 1 View
2002-03-07 FWCLM Index of Claims 1 View
2002-03-07 TRNA Transmittal of New Application 4 View
2002-03-07 DRW Drawings-only black and white line drawings 8 View
2002-03-07 SPEC Specification 16 View
2002-03-07 CLM Claims 4 View
2002-03-07 ABST Abstract 1 View
2002-03-07 OATH Oath or Declaration filed 7 View
2002-03-07 WFEE Fee Worksheet (SB06) 1 View
2002-03-07 WFEE Fee Worksheet (SB06) 1 View
2002-03-07 WCLM Claims Worksheet (PTO-2022) 1 View
2002-03-07 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-03-07 FOR Foreign Reference 11 View
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Quick Facts
App. No.
10/093,789
Filed
2002-03-07
Granted
2004-11-23
Pub. No.
US20030170951A1
Examiner
VU, DAVID
Art Unit
2818
PTA
-2 days