IP Library › Granted Patent US 6,760,640
Granted Patent Utility
US 6,760,640 · Confirmation No. 2258

AUTOMATED MANUFACTURING SYSTEM AND METHOD FOR PROCESSING PHOTOMASKS

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2004-05-28 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-03-14 TRNA Transmittal of New Application 4 View
2002-03-14 SPEC Specification 27 View
2002-03-14 CLM Claims 3 View
2002-03-14 ABST Abstract 1 View
2002-03-14 DRW Drawings-only black and white line drawings 6 View
2002-03-14 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,760,640
App. No.
10/099,622
Filed
2002-03-14
Granted
2004-07-06
Pub. No.
US20030177469A1
Art Unit
2125
PTA
0 days