Granted Patent
Utility
US 6,821,687
· Confirmation No. 5632
PHOTO MASK FOR FABRICATING SEMICONDUCTOR DEVICE HAVING DUAL DAMASCENE STRUCTURE
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Code | Description | Pages | ||
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| 2004-10-15 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-07-28 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-28 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-28 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-07-28 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-05-06 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-04-28 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-04-28 | SPEC |
Specification | 1 | View | |
| 2004-04-28 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2004-02-03 | CTNF |
Non-Final Rejection | 4 | View | |
| 2004-02-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-02-03 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-02-03 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-04-02 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-04-02 | ADS |
Application Data Sheet | 4 | View | |
| 2002-04-02 | SPEC |
Specification | 32 | View | |
| 2002-04-02 | CLM |
Claims | 7 | View | |
| 2002-04-02 | ABST |
Abstract | 1 | View | |
| 2002-04-02 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2002-04-02 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-04-02 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-04-02 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-04-02 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2002-04-02 | FRPR |
Certified Copy of Foreign Priority Application | 34 | View | |
| 2002-04-02 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2002-04-02 | FOR |
Foreign Reference | 6 | View | |
| 2002-04-02 | FOR |
Foreign Reference | 9 | View | |
| 2002-04-02 | FOR |
Foreign Reference | 28 | View |
Inventors
Nobuaki Hamanaka
Tokyo, JORDAN
Takashi Yokoyama
Tokyo, JAPAN
Kazutoshi Shiba
Tokyo, JAPAN
Noriaki Oda
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/5
G03F9/7076
H10W20/084
H10W20/0888
G03F1/42
Prosecution
- Examiner
- VISCONTI, GERALDINA
- Art Unit
- 1752
- Customer No.
- 466
- Docket No.
- 8018-1005
- Confirmation No.
- 5632
Foreign Priority
2001-103987
·
2001-04-02
·
JAPAN
Publication
- Pub. No.
- US20020142235A1
- Pub. Date
- 2002-10-03
Patent Term Adjustment
0days
No related applications found.
CHANGE OF ADDRESS
Recorded 2017-11-29
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-05-02
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-04-02
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Quick Facts
- Patent No.
- US 6,821,687
- App. No.
- 10/112,716
- Filed
- 2002-04-02
- Granted
- 2004-11-23
- Pub. No.
- US20020142235A1
- Examiner
- VISCONTI, GERALDINA
- Art Unit
- 1752
- PTA
- 0 days
External Links