Wafer-level test structure for edge-emitting semiconductor lasers
View Patent ↗Wafer-level stage testing of semiconductor lasers can be facilitated by directing a light beam emitted from the semiconductor laser toward a direction different from a path of the light beam as originally emitted from the laser. A test structure can be coupled to a back facet of the laser and can include a first region separated from a second region by an inclined interface. When a light beam is emitted from the laser, the light beam can be received on the inclined interface and then directed toward a light detector for detection and evaluation.
1. An article of manufacture, comprising:
at least one light emitting device located on a semiconductor wafer, wherein the light emitting device emits light substantially parallel to the plane of the wafer through one or both of a first end and a second end; and
a test structure formed in the wafer and removable therefrom, the test structure being optically coupled to one of the first end or the second end of the light emitting device and comprising an inclined interface formed in the wafer between a first non-gaseous material and a second non-gaseous material, wherein the interface is capable of directing light received from the first end or the second end of the light emitting device towards a direction different from an original path of the light emitted from the first end or the second end of the light emitting device.
2. The article of manufacture of claim 1 wherein the first end of each light emitting device comprises a front facet and the second end of each light emitting device comprises a back facet.
3. The article of manufacture of claim 2 wherein a plurality of light emitting devices are arranged in rows, the back facet of each light emitting device in a row opposing the back facet of a corresponding light emitting device located in an adjacent row.
4. The article of manufacture of claim 1 wherein the inclined interface is capable to reflect light received from the light emitting device in a direction substantially orthogonal to the original path.
5. The article of manufacture of claim 1 , further comprising a light detector formed adjacent to the test structure and capable to detect divergent light directed from the inclined interface.