Granted Patent
Utility
US 6,562,549
· Confirmation No. 8313
METHOD OF MANUFACTURING PHOTOMASKS BY PLASMA ETCHING WITH RESIST STRIPPED
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-04-29 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-04-29 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-04-29 | SPEC |
Specification | 9 | View | |
| 2002-04-29 | CLM |
Claims | 3 | View | |
| 2002-04-29 | ABST |
Abstract | 1 | View | |
| 2002-04-29 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-04-29 | OATH |
Oath or Declaration filed | 1 | View | |
| 2002-04-29 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Rick Zemen
Austin, TX
Tiecheng Zhou
Austin, TX
Attorneys & Agents of Record
Classification
USPC
430/316
G03F1/58
G03F1/46
G03F1/72
G03F1/80
Prosecution
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- Docket No.
- 67493/34
- Confirmation No.
- 8313
Publication
- Pub. No.
- US20020119380A1
- Pub. Date
- 2002-08-29
Patent Term Adjustment
0days
from
PHOTRONICS, INC.
SECURITY INTEREST
Recorded 2018-09-28
from
PHOTRONICS, INC.
SECURITY AGREEMENT
Recorded 2010-02-13
from
PHOTRONICS, INC.
SECURITY AGREEMENT
Recorded 2008-12-19
from
PHOTRONICS, INC.
SECURITY AGREEMENT
Recorded 2008-12-15
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Quick Facts
- Patent No.
- US 6,562,549
- App. No.
- 10/136,251
- Filed
- 2002-04-29
- Granted
- 2003-05-13
- Pub. No.
- US20020119380A1
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- PTA
- 0 days
External Links