Patent Application
Utility
App. No. 10/140,286
· Confirmation No. 6600
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND FORMING INTERLAYER DIELECTRIC FILM USING HIGH-DENSITY PLASMA
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-07-16 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-07-16 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-05-08 | TRNA |
Transmittal of New Application | 4 | View | |
| 2002-05-08 | A.PE |
Preliminary Amendment | 3 | View | |
| 2002-05-08 | SPEC |
Specification | 17 | View | |
| 2002-05-08 | CLM |
Claims | 6 | View | |
| 2002-05-08 | ABST |
Abstract | 1 | View | |
| 2002-05-08 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2002-05-08 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Woo Chan Jung
Seoul, KOREA, REPUBLIC OF
Jong Koo Lee
Kyungki-do, KOREA, REPUBLIC OF
Attorneys & Agents of Record
Classification
USPC
438/763
H10P14/60
H10P14/6682
H10D84/038
H10D84/0133
H10W20/098
H10P14/6924
H10P14/6336
H10P95/064
H10W20/075
H10W20/092
H10P14/69215
H10W20/071
Y10S438/958
Prosecution
- Examiner
- BLUM, DAVID S
- Art Unit
- 2813
- Docket No.
- SEC.938
- Confirmation No.
- 6600
Foreign Priority
2001-40686
·
2001-07-07
·
REPUBLIC OF KOREA
Publication
- Pub. No.
- US20030008492A1
- Pub. Date
- 2003-01-09
Patent Term Adjustment
-120days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-11-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-05-08
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Quick Facts
- App. No.
- 10/140,286
- Filed
- 2002-05-08
- Granted
- 2003-09-09
- Pub. No.
- US20030008492A1
- Examiner
- BLUM, DAVID S
- Art Unit
- 2813
- PTA
- -120 days
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