IP Library › Granted Patent US 6,656,838
Granted Patent Utility
US 6,656,838 · Confirmation No. 8014

PROCESS FOR PRODUCING SEMICONDUCTOR AND APPARATUS FOR PRODUCTION

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2003-10-07 A.NA Amendment after Notice of Allowance (Rule 312) 1 View
2003-10-07 SPEC Specification 1 View
2003-10-07 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-08-06 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-05-21 TRNA Transmittal of New Application 2 View
2002-05-21 A.PE Preliminary Amendment 2 View
2002-05-21 SPEC Specification 37 View
2002-05-21 CLM Claims 2 View
2002-05-21 ABST Abstract 1 View
2002-05-21 DRW Drawings-only black and white line drawings 11 View
2002-05-21 OATH Oath or Declaration filed 6 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,656,838
App. No.
10/150,950
Filed
2002-05-21
Granted
2003-12-02
Pub. No.
US20020137334A1
Art Unit
2812
PTA
-53 days