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App. No. 10/156,005 · Confirmation No. 3229

CATADIOPTRIC LITHOGRAPHY SYSTEM AND METHOD WITH RETICLE STAGE ORTHOGONAL TO WAFER STAGE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2005-03-10 COCOUT Certificate of Correction - Post Issue Communication 1 View
2004-10-26 COCIN Request for Certificate of Correction 7 View
2004-04-08 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-04-08 1449 List of References cited by applicant and considered by examiner 1 View
2004-04-06 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-04-06 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-04-06 LET. Miscellaneous Incoming Letter 6 View
2004-04-06 DRW Drawings-only black and white line drawings 11 View
2004-04-06 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-03-30 PGA9.DEC Decision for a Request for Corrected Patent Application Publication 2 View
2004-01-07 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-07 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-01-07 1449 List of References cited by applicant and considered by examiner 3 View
2004-01-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-01-07 FWCLM Index of Claims 1 View
2004-01-07 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-23 WFEE Fee Worksheet (SB06) 1 View
2003-12-17 LET. Miscellaneous Incoming Letter 3 View
2003-12-17 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2003-12-17 OATH Oath or Declaration filed 7 View
2003-12-17 LET. Miscellaneous Incoming Letter 2 View
2003-12-15 SRNT Examiner's search strategy and results 4 View
2003-09-15 LET. Miscellaneous Incoming Letter 3 View
2003-09-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-09-15 SPEC Specification 4 View
2003-09-15 CLM Claims 7 View
2003-09-15 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-09-15 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2003-09-15 FOR Foreign Reference 24 View
2003-09-15 FOR Foreign Reference 112 View
2003-06-26 CTNF Non-Final Rejection 5 View
2003-06-26 892 List of references cited by examiner 1 View
2003-06-19 SRNT Examiner's search strategy and results 3 View
2003-03-03 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
2003-03-03 FOR Foreign Reference 27 View
2002-05-29 TRNA Transmittal of New Application 5 View
2002-05-29 ADS Application Data Sheet 1 View
2002-05-29 SPEC Specification 20 View
2002-05-29 CLM Claims 4 View
2002-05-29 ABST Abstract 1 View
2002-05-29 DRW Drawings-only black and white line drawings 10 View
2002-05-29 OATH Oath or Declaration filed 5 View
2002-05-29 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-05-29 SRFW Search information including classification, databases and other search related notes 1 View
2002-05-29 FWCLM Index of Claims 1 View
2002-05-29 TRNA Transmittal of New Application 6 View
2002-05-29 DRW Drawings-only black and white line drawings 10 View
2002-05-29 SPEC Specification 20 View
2002-05-29 CLM Claims 4 View
2002-05-29 ABST Abstract 1 View
2002-05-29 OATH Oath or Declaration filed 5 View
2002-05-29 WFEE Fee Worksheet (SB06) 1 View
2002-05-29 WFEE Fee Worksheet (SB06) 1 View
2002-05-29 ADS Application Data Sheet 1 View
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Quick Facts
App. No.
10/156,005
Filed
2002-05-29
Granted
2004-06-29
Pub. No.
US20030223125A1
Art Unit
2873
PTA
-85 days