Semiconductor device
View Patent ↗A semiconductor device having at least two layers formed on a semiconductor substrate includes a first dielectric layer formed on the semiconductor substrate; a first interconnection layer which is formed on the first dielectric layer and has a first interconnection pattern and a dummy pattern formed around the first interconnection pattern; a second dielectric layer formed on the first interconnection layer; and a second interconnection layer which is formed on the second dielectric layer and has a second interconnection pattern. The dummy pattern is placed in the vicinity of only an area where the first and second interconnection patterns are superposed on each other.
1. A semiconductor device having at least two interconnection layers formed on a semiconductor substrate, comprising:
a first dielectric layer formed on said semiconductor substrate;
a first interconnection layer which is formed on said first dielectric layer and has a first interconnection pattern and a dummy pattern formed around said first interconnection pattern, wherein said dummy pattern is insulated from said first interconnection pattern;
a second dielectric layer formed on said first interconnection layer; and
a second interconnection layer which is formed on said second dielectric layer and has a second interconnection pattern, wherein said dummy pattern is placed in an area surrounding a predetermined distance from where said first and second interconnection patterns perpendicularly cross each other.
2. The semiconductor device according to claim 1 , wherein said dummy pattern is formed in a region spaced a first predetermined distance away from both said first and second interconnection patterns, within the area where said first and second interconnection patterns are superposed on each other.
3. The semiconductor device according to claim 1 , wherein said dummy pattern is formed from a plurality of small pieces of patterns.
4. The semiconductor device according to claim 2 , wherein said dummy pattern is spaced from said first interconnection pattern by only a second predetermined distance smaller than said first predetermined distance, and said dummy pattern is formed between said first and second predetermined distances.
5. The semiconductor device according to claim 4 , wherein said first predetermined distance is equal to 10 times or less the thickness of an interlayer film existing between said first and second interconnection patterns, and said second predetermined distance is substantially equal to the width of said first interconnection pattern.