Granted Patent
Utility
US 6,696,371
· Confirmation No. 6508
METHOD FOR FABRICATING POSITIONALLY EXACT SURFACE-WIDE MEMBRANE MASKS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-12-29 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-06-05 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-06-05 | SPEC |
Specification | 14 | View | |
| 2002-06-05 | CLM |
Claims | 4 | View | |
| 2002-06-05 | ABST |
Abstract | 1 | View | |
| 2002-06-05 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-06-05 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Joerg Butschke
Stuttgart, GERMANY
Albrecht Ehrmann
Krailling, GERMANY
Ernst Haugeneder
Wien, AUSTRIA
Florian Letzkus
Tuebingen, GERMANY
Reinhard Springer
Sulz, GERMANY
Attorneys & Agents of Record
Classification
USPC
438/942
G03F1/20
Y10S438/942
Prosecution
- Examiner
- BLUM, DAVID S
- Art Unit
- 2813
- Customer No.
- 24131
- Docket No.
- W&B-INF-1225
- Confirmation No.
- 6508
Foreign Priority
101 27 217.0
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2001-06-05
·
GERMANY
Publication
- Pub. No.
- US20020182895A1
- Pub. Date
- 2002-12-05
Patent Term Adjustment
-38days
No related applications found.
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Quick Facts
- Patent No.
- US 6,696,371
- App. No.
- 10/163,007
- Filed
- 2002-06-05
- Granted
- 2004-02-24
- Pub. No.
- US20020182895A1
- Examiner
- BLUM, DAVID S
- Art Unit
- 2813
- PTA
- -38 days
External Links