Granted Patent
Utility
US 6,706,453
· Confirmation No. 1853
METHOD FOR FORMATION OF SEMICONDUCTOR DEVICE PATTERN, METHOD FOR DESIGNING PHOTO MASK PATTERN, PHOTO MASK AND PROCESS FOR PHOTO MASK
Inventor:
Shuji Nakao
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-01-21 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-01-21 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2004-01-21 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-06-07 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-06-07 | SPEC |
Specification | 29 | View | |
| 2002-06-07 | CLM |
Claims | 5 | View | |
| 2002-06-07 | ABST |
Abstract | 1 | View | |
| 2002-06-07 | DRW |
Drawings-only black and white line drawings | 36 | View | |
| 2002-06-07 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Shuji Nakao
Hyogo, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/311
H10P76/00
G03F7/701
G03F1/70
G03F7/70125
G03F7/70433
Prosecution
- Examiner
- SAGAR, KRIPA
- Art Unit
- 1756
- Docket No.
- 57454-559
- Confirmation No.
- 1853
Foreign Priority
2000-255681(P)
·
2000-08-25
·
JAPAN
Publication
- Pub. No.
- US20020150844A1
- Pub. Date
- 2002-10-17
Patent Term Adjustment
-56days
CHANGE OF ADDRESS
Recorded 2017-11-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-04-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-09-10
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Quick Facts
- Patent No.
- US 6,706,453
- App. No.
- 10/163,458
- Filed
- 2002-06-07
- Granted
- 2004-03-16
- Pub. No.
- US20020150844A1
- Examiner
- SAGAR, KRIPA
- Art Unit
- 1756
- PTA
- -56 days
External Links