Granted Patent
Utility
US 6,813,003
· Confirmation No. 6124
ADVANCED ILLUMINATION SYSTEM FOR USE IN MICROLITHOGRAPHY
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| 2006-07-31 | PET.DEC.PUBS |
Petition decision routed to the publications branch to act on the decision or continue prosecution. | 1 | View | |
| 2006-07-28 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2005-11-18 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2005-11-03 | PET.OP |
Petition for review by the Office of Petitions | 8 | View | |
| 2005-11-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-10-11 | COCOUT |
Certificate of Correction - Post Issue Communication | 2 | View | |
| 2005-03-24 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2005-02-09 | COCIN |
Request for Certificate of Correction | 1 | View | |
| 2005-02-09 | COCIN |
Request for Certificate of Correction | 5 | View | |
| 2004-07-22 | IFEE |
Issue Fee Payment (PTO-85B) | 4 | View | |
| 2004-07-07 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-07-06 | CLM |
Claims | 2 | View | |
| 2004-07-06 | XRUSH |
Internal Response to Printer Query from Technology Center(TC) | 1 | View | |
| 2004-06-22 | RUSH |
Printer Query form, used by the publications branch | 1 | View | |
| 2004-05-14 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-05-14 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 2 | View | |
| 2004-05-14 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-05-14 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-05-14 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-05-05 | A.NE |
Response After Final Action | 3 | View | |
| 2004-05-05 | CLM |
Claims | 18 | View | |
| 2004-05-05 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-04-27 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2004-04-12 | A.NE |
Response After Final Action | 3 | View | |
| 2004-04-12 | CLM |
Claims | 18 | View | |
| 2004-04-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2004-03-22 | CTAV |
Advisory Action (PTOL-303) | 2 | View | |
| 2004-03-11 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-03-11 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-04 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 9 | View | |
| 2004-03-04 | FOR |
Foreign Reference | 8 | View | |
| 2004-03-04 | FOR |
Foreign Reference | 11 | View | |
| 2004-03-03 | A.NE |
Response After Final Action | 4 | View | |
| 2004-03-03 | CLM |
Claims | 19 | View | |
| 2004-03-03 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2004-02-20 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 2 | View | |
| 2004-02-05 | CTFR |
Final Rejection | 7 | View | |
| 2004-02-05 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2004-02-05 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-12-20 | FWCLM |
Index of Claims | 1 | View | |
| 2003-12-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-10-10 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2003-10-10 | SPEC |
Specification | 3 | View | |
| 2003-10-10 | CLM |
Claims | 19 | View | |
| 2003-10-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2003-10-10 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2003-10-10 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2003-08-19 | CTNF |
Non-Final Rejection | 7 | View | |
| 2003-08-19 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-08-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-08-13 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-07-31 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-06-11 | TRNA |
Transmittal of New Application | 6 | View | |
| 2002-06-11 | ADS |
Application Data Sheet | 2 | View | |
| 2002-06-11 | SPEC |
Specification | 16 | View | |
| 2002-06-11 | CLM |
Claims | 11 | View | |
| 2002-06-11 | ABST |
Abstract | 1 | View | |
| 2002-06-11 | DRW |
Drawings-only black and white line drawings | 14 | View | |
| 2002-06-11 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Mark Oskotsky
Mamaroneck, NY
Lev Ryzhikov
Norwalk, CT
Scott Coston
New Milford, CT
James Tsacoyeanes
Southbury, CT
Walter Augustyn
Monroe, CT
Attorneys & Agents of Record
Classification
USPC
355/67
G03F7/20
G03F7/70158
G03F7/70091
G03F7/70183
Prosecution
- Examiner
- FULLER, RODNEY EVAN
- Art Unit
- 2851
- Customer No.
- 26111
- Docket No.
- 1857.0850000
- Confirmation No.
- 6124
Publication
- Pub. No.
- US20030227609A1
- Pub. Date
- 2003-12-11
Patent Term Adjustment
0days
Child
is a Continuation in-part of
→
App. 11/335,599
· US 7,158,307
Filed 2006-01-20
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 10/896,022
· US 7,187,430
Filed 2004-07-22
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 11/682,573
Filed 2007-03-06
· Abandoned -- Failure to Respond to an Office Action
Child
is a Continuation in-part of
→
App. 10/812,978
· US 7,079,321
Filed 2004-03-31
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-11
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Quick Facts
- Patent No.
- US 6,813,003
- App. No.
- 10/166,062
- Filed
- 2002-06-11
- Granted
- 2004-11-02
- Pub. No.
- US20030227609A1
- Examiner
- FULLER, RODNEY EVAN
- Art Unit
- 2851
- PTA
- 0 days
External Links