IP Library Granted Patent US 6,813,003
Granted Patent Utility
US 6,813,003 · Confirmation No. 6124

ADVANCED ILLUMINATION SYSTEM FOR USE IN MICROLITHOGRAPHY

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2006-07-31 PET.DEC.PUBS Petition decision routed to the publications branch to act on the decision or continue prosecution. 1 View
2006-07-28 IMIS Miscellaneous Internal Document 1 View
2005-11-18 COCOUT Certificate of Correction - Post Issue Communication 1 View
2005-11-03 PET.OP Petition for review by the Office of Petitions 8 View
2005-11-03 WFEE Fee Worksheet (SB06) 1 View
2005-10-11 COCOUT Certificate of Correction - Post Issue Communication 2 View
2005-03-24 IMIS Miscellaneous Internal Document 1 View
2005-02-09 COCIN Request for Certificate of Correction 1 View
2005-02-09 COCIN Request for Certificate of Correction 5 View
2004-07-22 IFEE Issue Fee Payment (PTO-85B) 4 View
2004-07-07 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-07-06 CLM Claims 2 View
2004-07-06 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-06-22 RUSH Printer Query form, used by the publications branch 1 View
2004-05-14 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-14 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-05-14 1449 List of References cited by applicant and considered by examiner 1 View
2004-05-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-14 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-05 A.NE Response After Final Action 3 View
2004-05-05 CLM Claims 18 View
2004-05-05 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-04-27 CTAV Advisory Action (PTOL-303) 3 View
2004-04-12 A.NE Response After Final Action 3 View
2004-04-12 CLM Claims 18 View
2004-04-12 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-03-22 CTAV Advisory Action (PTOL-303) 2 View
2004-03-11 WFEE Fee Worksheet (SB06) 1 View
2004-03-11 FWCLM Index of Claims 1 View
2004-03-04 IDS Information Disclosure Statement (IDS) Form (SB08) 9 View
2004-03-04 FOR Foreign Reference 8 View
2004-03-04 FOR Foreign Reference 11 View
2004-03-03 A.NE Response After Final Action 4 View
2004-03-03 CLM Claims 19 View
2004-03-03 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-02-20 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-02-05 CTFR Final Rejection 7 View
2004-02-05 DRW Drawings-only black and white line drawings 1 View
2004-02-05 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-20 FWCLM Index of Claims 1 View
2003-12-20 WFEE Fee Worksheet (SB06) 1 View
2003-10-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-10-10 SPEC Specification 3 View
2003-10-10 CLM Claims 19 View
2003-10-10 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-10-10 LET. Miscellaneous Incoming Letter 3 View
2003-10-10 DRW Drawings-only black and white line drawings 1 View
2003-08-19 CTNF Non-Final Rejection 7 View
2003-08-19 892 List of references cited by examiner 1 View
2003-08-19 SRFW Search information including classification, databases and other search related notes 1 View
2003-08-13 SRNT Examiner's search strategy and results 1 View
2003-07-31 WFEE Fee Worksheet (SB06) 1 View
2002-06-11 TRNA Transmittal of New Application 6 View
2002-06-11 ADS Application Data Sheet 2 View
2002-06-11 SPEC Specification 16 View
2002-06-11 CLM Claims 11 View
2002-06-11 ABST Abstract 1 View
2002-06-11 DRW Drawings-only black and white line drawings 14 View
2002-06-11 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,813,003
App. No.
10/166,062
Filed
2002-06-11
Granted
2004-11-02
Pub. No.
US20030227609A1
Art Unit
2851
PTA
0 days