IP Library › Granted Patent US 6,621,082
Granted Patent Utility
US 6,621,082 · Confirmation No. 9105

AUTOMATIC FOCUSING SYSTEM FOR SCANNING ELECTRON MICROSCOPE EQUIPPED WITH LASER DEFECT DETECTION FUNCTION

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2003-08-21 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2003-06-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-06-30 FRPR Certified Copy of Foreign Priority Application 18 View
2003-06-30 LET. Miscellaneous Incoming Letter 2 View
2002-09-09 TRNA Transmittal of New Application 4 View
2002-09-09 DRW Drawings-only black and white line drawings 2 View
2002-09-09 OATH Oath or Declaration filed 1 View
2002-09-09 LET. Miscellaneous Incoming Letter 1 View
2002-06-13 TRNA Transmittal of New Application 2 View
2002-06-13 SPEC Specification 17 View
2002-06-13 CLM Claims 6 View
2002-06-13 ABST Abstract 1 View
2002-06-13 DRW Drawings-only black and white line drawings 2 View
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Quick Facts
Patent No.
US 6,621,082
App. No.
10/171,797
Filed
2002-06-13
Granted
2003-09-16
Pub. No.
US20030006372A1
Art Unit
2881
PTA
0 days