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App. No. 10/186,970 · Confirmation No. 8024

WAFER HANDLING SYSTEM AND WAFER HANDLING METHOD

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-06-01 LET. Miscellaneous Incoming Letter 1 View
2004-06-01 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-06-01 DRW Drawings-only black and white line drawings 1 View
2004-04-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-07-01 TRNA Transmittal of New Application 2 View
2002-07-01 SPEC Specification 24 View
2002-07-01 CLM Claims 7 View
2002-07-01 ABST Abstract 1 View
2002-07-01 DRW Drawings-only black and white line drawings 4 View
2002-07-01 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/186,970
Filed
2002-07-01
Granted
2004-07-27
Pub. No.
US20030002973A1
Art Unit
3651
PTA
-62 days