IP Library › Granted Patent US 6,720,271
Granted Patent Utility
US 6,720,271 · Confirmation No. 8838

PROCESS FOR REMOVING POLYMERS DURING THE FABRICATION OF SEMICONDUCTOR DEVICES

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2004-02-03 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-12-30 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-12-30 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-12-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-30 FWCLM Index of Claims 1 View
2003-12-22 SRNT Examiner's search strategy and results 1 View
2003-11-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-11-17 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-11-17 AF/D Affidavit-submitted prior to Mar 15, 2013 3 View
2003-11-17 APPENDIX Appendix to the specification 6 View
2003-11-17 APPENDIX Appendix to the specification 6 View
2003-11-17 XT/ Extension of Time 2 View
2003-11-17 TRNA Transmittal of New Application 1 View
2003-07-16 CTNF Non-Final Rejection 8 View
2003-07-16 892 List of references cited by examiner 1 View
2003-07-16 SRFW Search information including classification, databases and other search related notes 1 View
2003-07-16 FWCLM Index of Claims 1 View
2003-07-10 SRNT Examiner's search strategy and results 1 View
2003-01-21 LET. Miscellaneous Incoming Letter 5 View
2002-10-08 LET. Miscellaneous Incoming Letter 5 View
2002-10-08 OATH Oath or Declaration filed 4 View
2002-08-08 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-07-02 TRNA Transmittal of New Application 1 View
2002-07-02 TRNA Transmittal of New Application 1 View
2002-07-02 ADS Application Data Sheet 4 View
2002-07-02 ADS Application Data Sheet 4 View
2002-07-02 SPEC Specification 9 View
2002-07-02 SPEC Specification 9 View
2002-07-02 CLM Claims 4 View
2002-07-02 CLM Claims 4 View
2002-07-02 ABST Abstract 1 View
2002-07-02 ABST Abstract 1 View
2002-07-02 DRW Drawings-only black and white line drawings 2 View
2002-07-02 DRW Drawings-only black and white line drawings 2 View
2002-07-02 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,720,271
App. No.
10/189,152
Filed
2002-07-02
Granted
2004-04-13
Pub. No.
US20030027429A1
Art Unit
2812
PTA
-32 days