Patent Application
Utility
App. No. 10/190,097
· Confirmation No. 5723
METHOD FOR ADJUSTING A TEMPERATURE IN A RESIST PROCESS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-09-07 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-06-10 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-10 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-06-10 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-06-10 | FWCLM |
Index of Claims | 1 | View | |
| 2004-06-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-04-13 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2004-04-13 | CLM |
Claims | 4 | View | |
| 2004-04-13 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2004-01-08 | CTNF |
Non-Final Rejection | 5 | View | |
| 2004-01-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-01-08 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2004-01-08 | FWCLM |
Index of Claims | 1 | View | |
| 2004-01-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-12-23 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2002-08-26 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 2 | View | |
| 2002-08-12 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2002-07-31 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-07-31 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-07-31 | FRPR |
Certified Copy of Foreign Priority Application | 18 | View | |
| 2002-07-03 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-07-03 | SPEC |
Specification | 17 | View | |
| 2002-07-03 | CLM |
Claims | 4 | View | |
| 2002-07-03 | ABST |
Abstract | 1 | View | |
| 2002-07-03 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-07-03 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-07-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-07-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-07-03 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View |
Inventors
Thorsten Schedel
Dresden, GERMANY
Torsten Seidel
Dresden, GERMANY
Attorneys & Agents of Record
Classification
USPC
430/30
G03F7/38
G03F7/40
Prosecution
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- Customer No.
- 24131
- Docket No.
- P2001,0460
- Confirmation No.
- 5723
Foreign Priority
01 116 132.0
·
2001-07-03
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20030008242A1
- Pub. Date
- 2003-01-09
Patent Term Adjustment
-5days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-14
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-09-07
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Quick Facts
- App. No.
- 10/190,097
- Filed
- 2002-07-03
- Granted
- 2004-10-19
- Pub. No.
- US20030008242A1
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- PTA
- -5 days
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