IP Library Granted Patent US 6,562,188
Granted Patent Utility
US 6,562,188 · Confirmation No. 4754

RESIST MASK FOR MEASURING THE ACCURACY OF OVERLAID LAYERS

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Code Description Pages PDF
2002-07-17 TRNA Transmittal of New Application 2 View
2002-07-17 A.PE Preliminary Amendment 8 View
2002-07-17 SPEC Specification 9 View
2002-07-17 CLM Claims 5 View
2002-07-17 ABST Abstract 1 View
2002-07-17 DRW Drawings-only black and white line drawings 3 View
2002-07-17 OATH Oath or Declaration filed 5 View
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Quick Facts
Patent No.
US 6,562,188
App. No.
10/196,413
Filed
2002-07-17
Granted
2003-05-13
Pub. No.
US20020182817A1
Art Unit
1765
PTA
0 days