IP Library › Granted Patent US 6,665,576
Granted Patent Utility
US 6,665,576 · Confirmation No. 9163

METHOD AND SYSTEM FOR MANAGING SEMICONDUCTOR MANUFACTURING EQUIPMENT

Inventor: Shunji Hayashi
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Quick Facts
Patent No.
US 6,665,576
App. No.
10/206,067
Filed
2002-07-29
Granted
2003-12-16
Pub. No.
US20020188367A1
Art Unit
2125
PTA
0 days