Granted Patent
Utility
US 6,773,854
· Confirmation No. 7519
METHOD OF PRODUCING A PERFORATED MASK FOR PARTICLE RADIATION
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-02-09 | PETDEC |
Petition Decision | 2 | View | |
| 2008-04-04 | PET.OP |
Petition for review by the Office of Petitions | 1 | View | |
| 2008-04-04 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2004-12-03 | PET.OP |
Petition for review by the Office of Petitions | 4 | View | |
| 2004-11-18 | COCOUT |
Certificate of Correction - Post Issue Communication | 2 | View | |
| 2004-08-30 | COCIN |
Request for Certificate of Correction | 4 | View | |
| 2004-06-22 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-03-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-03-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-03-18 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2004-03-18 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-03-18 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-03-18 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-10-11 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2002-09-24 | OATH |
Oath or Declaration filed | 7 | View | |
| 2002-09-24 | FRPR |
Certified Copy of Foreign Priority Application | 30 | View | |
| 2002-09-24 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-09-04 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2002-07-31 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-07-31 | SPEC |
Specification | 30 | View | |
| 2002-07-31 | CLM |
Claims | 10 | View | |
| 2002-07-31 | ABST |
Abstract | 1 | View | |
| 2002-07-31 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-07-31 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-07-31 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-07-31 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Albrecht Ehrmann
Krailing, GERMANY
Ernst Haugeneder
Wien, AUSTRIA
Frank-Michael Kamm
Unterhaching, GERMANY
Alexander Petraschenko
Munchen, GERMANY
Stefan Schunck
Munchen, GERMANY
Attorneys & Agents of Record
Classification
USPC
430/5
G03F1/20
H01J2237/0453
H01J2237/3175
Prosecution
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- Customer No.
- 24131
- Docket No.
- W&B-INF-1268
- Confirmation No.
- 7519
Foreign Priority
101 37 398.8
·
2001-07-31
·
GERMANY
Publication
- Pub. No.
- US20030059689A1
- Pub. Date
- 2003-03-27
Patent Term Adjustment
-4days
No related applications found.
from
SCHUNCK, STEFAN,
EHRMANN, ALBRECHT,
HAUGENDEGER, ERNST,
KAMM, FRANK - MICHAEL,
PETRASCHENKO, ALEXANDER
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE LISTING: INFINEON TECHNOLOGIES AG AND IMS IONEN MIKROFABRIKATIONS SYSTEME GMBH. PREVIOUSLY RECORDED ON REEL 020710 FRAME 0253. ASSIGNOR(S) HEREBY CONFIRMS THE SECOND ASSIGNEE IMS IONEN MIKORFABRIKATIONS SYSTEME GMBH WAS INADVERTENTLY OMMITTED.
Recorded 2008-03-28
from
SCHUNCK, STEFAN,
EHRMANN, ALBRECHT,
HAUGENDEGER, ERNST,
KAMM, FRANK - MICHAEL,
PETRASCHENKO, ALEXANDER
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-03-27
from
SCHUNCK, STEFAN,
EHRMANN, ALBRECHT,
HAUGENEDER, ERNST,
KAMM, FRANK-MICHAEL,
PETRASCHENKO, ALEXANDER
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-07-19
from
SCHUNCK, STEFAN,
EHRMANN, ALBRECHT,
HAUGENEDER, ERNST,
KAMM, FRANK-MICHAEL,
PETRASCHENKO, ALEXANDER
RE-RECORD TO CORRECT THE INVENTORS NAME PREVIOUSLY RECORDED AT REEL/FRAME 015486/0889
Recorded 2005-01-13
from
SCHUNK, STEFAN,
EHRMANN, ALBRECHT,
HAUGENEDER, ERNST,
KAMM, FRANK-MICHAEL,
PETRASCHENKO, ALEXANDER
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-12-03
from
SCHUNK, STEFAN,
EHRMANN, ALBRECHT,
HAUGENEDER, ERNST,
KAMM, FRANK-MICHAEL,
PETRASCHENKO, ALEXANDER
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-06-22
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Quick Facts
- Patent No.
- US 6,773,854
- App. No.
- 10/210,011
- Filed
- 2002-07-31
- Granted
- 2004-08-10
- Pub. No.
- US20030059689A1
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- PTA
- -4 days
External Links