Granted Patent
Utility
US 6,607,978
· Confirmation No. 2454
METHOD OF MAKING A SEMICONDUCTOR DEVICE WITH ALLOY FILM BETWEEN BARRIER METAL AND INTERCONNECT
Inventor:
Yoshihisa Matsubara
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-08-07 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-08-07 | ADS |
Application Data Sheet | 3 | View | |
| 2002-08-07 | SPEC |
Specification | 27 | View | |
| 2002-08-07 | CLM |
Claims | 2 | View | |
| 2002-08-07 | ABST |
Abstract | 1 | View | |
| 2002-08-07 | DRW |
Drawings-only black and white line drawings | 18 | View | |
| 2002-08-07 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Yoshihisa Matsubara
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/628
H10W20/033
H10W20/035
H10W20/425
H10W20/037
H10W20/081
H10W20/42
H10W20/039
H10W20/055
H10W20/056
H10W20/049
H10W20/064
Prosecution
- Examiner
- HOANG, QUOC DINH
- Art Unit
- 2818
- Customer No.
- 466
- Docket No.
- 8017-1031-1
- Confirmation No.
- 2454
Foreign Priority
11-267444
·
1999-09-21
·
JAPAN
Publication
- Pub. No.
- US20030003727A1
- Pub. Date
- 2003-01-02
Patent Term Adjustment
-136days
CHANGE OF ADDRESS
Recorded 2017-11-29
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-06-23
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Quick Facts
- Patent No.
- US 6,607,978
- App. No.
- 10/212,739
- Filed
- 2002-08-07
- Granted
- 2003-08-19
- Pub. No.
- US20030003727A1
- Examiner
- HOANG, QUOC DINH
- Art Unit
- 2818
- PTA
- -136 days
External Links