IP Library › Granted Patent US 6,753,271
Granted Patent Utility
US 6,753,271 · Confirmation No. 8376

ATOMIC LAYER DEPOSITION METHODS

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2005-03-18 COCOUT Certificate of Correction - Post Issue Communication 1 View
2004-04-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-03-08 A.NA Amendment after Notice of Allowance (Rule 312) 3 View
2004-03-08 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-03-08 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2004-01-12 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2004-01-12 FOR Foreign Reference 24 View
2004-01-12 FOR Foreign Reference 23 View
2004-01-12 FOR Foreign Reference 53 View
2004-01-12 FOR Foreign Reference 43 View
2004-01-05 RCEX Request for Continued Examination (RCE) 1 View
2004-01-05 A.PE Preliminary Amendment 1 View
2004-01-05 CLM Claims 11 View
2004-01-05 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-01-05 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-09-24 RCEX Request for Continued Examination (RCE) 1 View
2003-09-24 A.PE Preliminary Amendment 1 View
2003-09-24 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-09-24 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-08-15 TRNA Transmittal of New Application 2 View
2002-08-15 SPEC Specification 17 View
2002-08-15 CLM Claims 11 View
2002-08-15 ABST Abstract 1 View
2002-08-15 DRW Drawings-only black and white line drawings 2 View
2002-08-15 OATH Oath or Declaration filed 5 View
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Quick Facts
Patent No.
US 6,753,271
App. No.
10/222,282
Filed
2002-08-15
Granted
2004-06-22
Pub. No.
US20040033688A1
Art Unit
2812
PTA
-107 days