IP Library › Granted Patent US 6,716,772
Granted Patent Utility
US 6,716,772 · Confirmation No. 1725

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS

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2003-11-12 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-12 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-11-12 1449 List of References cited by applicant and considered by examiner 1 View
2003-11-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-12 FWCLM Index of Claims 1 View
2003-11-12 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-09 XT/ Extension of Time 1 View
2003-09-15 TRNA Transmittal of New Application 2 View
2003-09-15 XT/ Extension of Time 1 View
2003-09-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-15 CLM Claims 6 View
2003-09-15 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-03-14 CTNF Non-Final Rejection 5 View
2003-03-14 892 List of references cited by examiner 1 View
2002-11-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-11-13 SPEC Specification 5 View
2002-11-13 CLM Claims 5 View
2002-11-13 REM Applicant Arguments/Remarks Made in an Amendment 12 View
2002-11-13 LET. Miscellaneous Incoming Letter 5 View
2002-08-20 TRNA Transmittal of New Application 3 View
2002-08-20 SPEC Specification 19 View
2002-08-20 CLM Claims 4 View
2002-08-20 ABST Abstract 1 View
2002-08-20 DRW Drawings-only black and white line drawings 6 View
2002-08-20 OATH Oath or Declaration filed 5 View
2002-08-20 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-08-20 SRFW Search information including classification, databases and other search related notes 1 View
2002-08-20 FWCLM Index of Claims 1 View
2002-08-20 TRNA Transmittal of New Application 4 View
2002-08-20 DRW Drawings-only black and white line drawings 6 View
2002-08-20 SPEC Specification 19 View
2002-08-20 CLM Claims 4 View
2002-08-20 ABST Abstract 1 View
2002-08-20 OATH Oath or Declaration filed 5 View
2002-08-20 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,716,772
App. No.
10/223,981
Filed
2002-08-20
Granted
2004-04-06
Pub. No.
US20020197890A1
Art Unit
2812
PTA
-93 days