IP Library › Granted Patent US 6,826,451
Granted Patent Utility
US 6,826,451 · Confirmation No. 5286

LITHOGRAPHY TOOL HAVING A VACUUM RETICLE LIBRARY COUPLED TO A VACUUM CHAMBER

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2004-10-19 IFEE Issue Fee Payment (PTO-85B) 4 View
2004-09-03 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-09-03 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-09-03 1449 List of References cited by applicant and considered by examiner 1 View
2004-09-03 892 List of references cited by examiner 1 View
2004-09-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-09-03 FWCLM Index of Claims 1 View
2004-09-03 SRFW Search information including classification, databases and other search related notes 1 View
2004-09-03 SPEC Specification 1 View
2004-08-20 SRNT Examiner's search strategy and results 4 View
2004-05-07 WFEE Fee Worksheet (SB06) 1 View
2004-04-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-04-28 SPEC Specification 1 View
2004-04-28 CLM Claims 7 View
2004-04-28 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-04-28 PA.. Power of Attorney 3 View
2004-04-28 IDS Information Disclosure Statement (IDS) Form (SB08) 9 View
2004-04-28 FOR Foreign Reference 28 View
2004-04-28 FOR Foreign Reference 14 View
2004-04-28 FOR Foreign Reference 18 View
2004-04-28 FOR Foreign Reference 14 View
2004-02-09 CTNF Non-Final Rejection 9 View
2004-02-09 892 List of references cited by examiner 1 View
2004-02-09 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-02 SRNT Examiner's search strategy and results 3 View
2004-01-29 SRNT Examiner's search strategy and results 2 View
2003-02-04 LET. Miscellaneous Incoming Letter 2 View
2003-02-04 PA.. Power of Attorney 6 View
2002-11-25 PEFR Applicant Response to Pre-Exam Formalities Notice 5 View
2002-11-25 OATH Oath or Declaration filed 4 View
2002-09-25 PEFN Pre-Exam Formalities Notice 2 View
2002-08-22 TRNA Transmittal of New Application 4 View
2002-08-22 ADS Application Data Sheet 1 View
2002-08-22 SPEC Specification 10 View
2002-08-22 CLM Claims 7 View
2002-08-22 ABST Abstract 1 View
2002-08-22 DRW Drawings-only black and white line drawings 9 View
2002-08-22 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,826,451
App. No.
10/225,343
Filed
2002-08-22
Granted
2004-11-30
Pub. No.
US20040019408A1
Art Unit
3661
PTA
0 days