Patent Application
Utility
App. No. 10/206,400
· Confirmation No. 8892
Lithography tool having a vacuum reticle library coupled to a vacuum chamber
Abandoned -- Incomplete Application (Pre-examination)
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-10-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-07-29 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-07-29 | ADS |
Application Data Sheet | 1 | View | |
| 2002-07-29 | SPEC |
Specification | 10 | View | |
| 2002-07-29 | CLM |
Claims | 5 | View | |
| 2002-07-29 | ABST |
Abstract | 1 | View | |
| 2002-07-29 | DRW |
Drawings-only black and white line drawings | 9 | View |
Inventors
Santiago del Puerto
Milton, NY
Markus F A Eurlings
Breda, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
700/245
Prosecution
- Examiner
- MARC, MCDIEUNEL
- Art Unit
- 3661
- Customer No.
- 26111
- Docket No.
- 1857.0880000
- Confirmation No.
- 8892
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Quick Facts
- App. No.
- 10/206,400
- Filed
- 2002-07-29
- Examiner
- MARC, MCDIEUNEL
- Art Unit
- 3661
External Links