Granted Patent
Utility
US 6,797,526
· Confirmation No. 8302
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD AND ITS APPARATUS FOR PROCESSING DETECTED DEFECT DATA
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-08-23 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-05-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-05-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-05-18 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-05-18 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-05-18 | FWCLM |
Index of Claims | 1 | View | |
| 2004-05-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-05-18 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-04-28 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-09-30 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-02-07 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-02-07 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-02-07 | FOR |
Foreign Reference | 10 | View | |
| 2003-02-07 | FOR |
Foreign Reference | 26 | View | |
| 2003-01-30 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-01-30 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-01-30 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-08-30 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-08-30 | ADS |
Application Data Sheet | 6 | View | |
| 2002-08-30 | SPEC |
Specification | 64 | View | |
| 2002-08-30 | CLM |
Claims | 16 | View | |
| 2002-08-30 | ABST |
Abstract | 1 | View | |
| 2002-08-30 | DRW |
Drawings-only black and white line drawings | 20 | View | |
| 2002-08-30 | OATH |
Oath or Declaration filed | 5 | View | |
| 2002-08-30 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-08-30 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-08-30 | ADS |
Application Data Sheet | 6 | View | |
| 2002-08-30 | SPEC |
Specification | 64 | View | |
| 2002-08-30 | CLM |
Claims | 16 | View | |
| 2002-08-30 | ABST |
Abstract | 1 | View | |
| 2002-08-30 | DRW |
Drawings-only black and white line drawings | 20 | View | |
| 2002-08-30 | OATH |
Oath or Declaration filed | 5 | View | |
| 2002-08-30 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-08-30 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-08-30 | FRPR |
Certified Copy of Foreign Priority Application | 64 | View |
Inventors
Maki Tanaka
Tokyo, JAPAN
Shunji Maeda
Tokyo, JAPAN
Minori Noguchi
Tokyo, JAPAN
Takafumi Okabe
Tokyo, JAPAN
Yuji Takagi
Tokyo, JAPAN
Chie Shishido
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/5
H10P72/0612
H10P74/23
Prosecution
- Examiner
- HARRISON, MONICA D
- Art Unit
- 2829
- Customer No.
- 20350
- Docket No.
- 16869P-058200US
- Confirmation No.
- 8302
Foreign Priority
2001-287779
·
2001-09-20
·
JAPAN
Publication
- Pub. No.
- US20030054573A1
- Pub. Date
- 2003-03-20
Patent Term Adjustment
-5days
CHANGE OF NAME AND ADDRESS
Recorded 2020-03-30
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-01-06
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-01-30
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Quick Facts
- Patent No.
- US 6,797,526
- App. No.
- 10/232,871
- Filed
- 2002-08-30
- Granted
- 2004-09-28
- Pub. No.
- US20030054573A1
- Examiner
- HARRISON, MONICA D
- Art Unit
- 2829
- PTA
- -5 days
External Links