IP Library › Granted Patent US 6,821,689
Granted Patent Utility
US 6,821,689 · Confirmation No. 5826

USING SECOND EXPOSURE TO ASSIST A PSM EXPOSURE IN PRINTING A TIGHT SPACE ADJACENT TO LARGE FEATURE

Inventor: Christophe Pierrat
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Quick Facts
Patent No.
US 6,821,689
App. No.
10/244,451
Filed
2002-09-16
Granted
2004-11-23
Pub. No.
US20040053141A1
Art Unit
1756
PTA
0 days