Semiconductor device having different metal-semiconductor portions formed in a semiconductor region and a method for fabricating the semiconductor device
View Patent ↗In a method for fabricating a semiconductor device different types of a metal-semiconductor compound are formed on or in at least two different conductive semiconductor regions so that for each semiconductor region the metal-semiconductor compound region may be formed to obtain an optimum overall performance of the semiconductor device. On one of the two semiconductor regions, the metal-semiconductor compound is formed of at least two different metal layers, whereas the metal-semiconductor compound in or on the other semiconductor region is formed from a single metal layer.
1. A method of fabricating a semiconductor device, the method comprising:
providing a substrate having formed thereon at least one first transistor and at least one second transistor, each of said first and second transistors being comprised of a gate electrode and a plurality of source/drain regions;
depositing a first metal layer on the at least one first and second transistors; forming a mask layer above the first metal layer wherein the first metal layer above the at least one second transistor is exposed;
removing the first metal layer from above the at least one second transistor;
performing at least one heat treating process on the first metal layer to form a first metal silicide compound on the gate electrode and the source/drain regions of the at least one first transistor;
depositing a second metal layer over the at least one first and second transistors; and
performing at least one heat treating process on the second metal layer to form a second metal silicide compound on at least one of the gate electrode and the source/drain regions of the at least one second transistor.
2. The method of claim 1 , wherein said first metal layer and said second metal layer differ from each other in at least one of type of material and layer thickness.
3. The method of claim 1 , wherein said first and second metal layers comprise at least one of cobalt, titanium, tantalum, tungsten, nickel, zirconium, an alloy thereof and a combination thereof.
4. The method of claim 1 , wherein performing at least one heat treating process on said first metal layer comprises:
performing a first annealing step with a first average temperature for a first time interval;
selectively removing material of the first metal layer that has not reacted with the underlying material; and
performing a second annealing step at a second average temperature for a second time interval, wherein the first temperature is lower than the second temperature.
5. The method of claim 1 , wherein performing at least one heat treating process on said second metal layer comprises:
performing a first annealing step at a first average temperature for a first time interval;
selectively removing the material of the second metal layer that has not reacted with the underlying material; and
performing a second annealing step at a second average temperature for a second time interval, wherein the first temperature is lower than the second temperature.
6. The method of claim 4 , wherein said first and second average temperatures and said first and second time intervals are controlled so as to adjust the depth of said first metal suicide compound.
7. The method of claim 5 , wherein said first and second average temperatures and said first and second time intervals are controlled so as to adjust the depth of said second metal silicide compound.
8. The method of claim 1 , wherein at least one of the gate electrode and source/drain regions of said first and second transistors comprises at least one of silicon and germanium.
9. The method of claim 1 , wherein said source/drain regions of said first and second transistors differ from each other by at least one of crystalline structure, dopant concentration, dopant profile in a depth dimension and cross-section area.
10. The method of claim 1 , wherein said first and second transistors differ from each other in at least one of type of channel conductivity and gate length.
11. A method of fabricating a semiconductor device, the method comprising:
providing a substrate having formed thereon at least one first transistor and at least one second transistor, each of said transistors being comprised of a gate electrode and a plurality of source/drain regions;
depositing a first metal layer on the at least one first and second transistors;
selectively removing the first metal layer from above the at least one second transistor;
depositing a second metal layer on the at least one first and second transistors; and
performing at least one heat treating process to form a first metal silicide compound on at least one of the gate electrode and the plurality of source/drain regions of said first transistor and a second metal silicide compound on at least one of the gate electrode and the source/drain regions of said second transistor.
12. The method of claim 11 , wherein selectively removing the first metal layer includes forming a mask layer above said first metal layer to expose the first metal layer above said at least one second transistor, and selectively etching said first metal layer above said at least one second transistor.
13. The method of claim 11 , wherein performing at least one heat treating process comprises:
performing a first annealing step at a first average temperature for a first time interval;
selectively removing material of the first and the second metal layers that has not reacted with the underlying material; and
performing a second annealing step at a second average temperature for a second time interval, wherein the first temperature is less than the second temperature.
14. The method of claim 13 , wherein said first and second average temperatures and said first and second time intervals are controlled so as to adjust the depth of said first and second metal silicide compounds.
15. The method of claim 11 , wherein said first and second metal layers differ from each other by at least one of layer thickness and type of material.
16. The method of claim 11 , wherein said first and second metal layers comprise at least one of cobalt, titanium, tantalum, zirconium, tungsten, nickel, an alloy thereof and any combination thereof.
17. The method of claim 11 , wherein at least one of said first and second metal layers comprise at least one noble metal.
18. The method of claim 11 , wherein the source/drain regions of said first and second transistors differ from each other in at least one of crystalline structure, type of dopant, dopant concentration, dopant profile in a depth dimension and cross-section area.
19. The method of claim 11 , wherein said first and second transistors differ from each other in at least one of type of channel conductivity and gate length.