IP Library › Granted Patent US 6,730,600
Granted Patent Utility
US 6,730,600 · Confirmation No. 4037

METHOD OF DRY ETCHING A SEMICONDUCTOR DEVICE IN THE ABSENCE OF A PLASMA

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2004-03-08 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-01-08 WFEE Fee Worksheet (SB06) 1 View
2004-01-08 FWCLM Index of Claims 1 View
2003-12-23 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-12-23 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-12-23 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-18 SRNT Examiner's search strategy and results 2 View
2003-12-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-12-01 CLM Claims 4 View
2003-12-01 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-08-25 CTNF Non-Final Rejection 11 View
2003-08-25 892 List of references cited by examiner 1 View
2003-08-25 1449 List of References cited by applicant and considered by examiner 1 View
2003-08-13 SRNT Examiner's search strategy and results 2 View
2002-11-20 OATH Oath or Declaration filed 7 View
2002-11-20 LET. Miscellaneous Incoming Letter 4 View
2002-10-28 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-09-27 TRNA Transmittal of New Application 2 View
2002-09-27 SPEC Specification 6 View
2002-09-27 CLM Claims 4 View
2002-09-27 ABST Abstract 1 View
2002-09-27 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-09-27 SRFW Search information including classification, databases and other search related notes 1 View
2002-09-27 FWCLM Index of Claims 1 View
2002-09-27 TRNA Transmittal of New Application 2 View
2002-09-27 SPEC Specification 6 View
2002-09-27 CLM Claims 4 View
2002-09-27 ABST Abstract 1 View
2002-09-27 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,730,600
App. No.
10/259,256
Filed
2002-09-27
Granted
2004-05-04
Pub. No.
US20040063315A1
Art Unit
2813
PTA
-6 days