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App. No. 10/262,992 · Confirmation No. 3424

PASSIVATION METHOD FOR IMPROVED UNIFORMITY AND REPEATABILITY FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAPOR DEPOSITION

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2003-12-29 IFEE Issue Fee Payment (PTO-85B) 2 View
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2003-09-22 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-09-22 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-09-22 892 List of references cited by examiner 1 View
2003-09-22 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-09-22 FWCLM Index of Claims 1 View
2003-09-22 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-04 SRNT Examiner's search strategy and results 3 View
2003-01-17 LET. Miscellaneous Incoming Letter 3 View
2003-01-17 OATH Oath or Declaration filed 5 View
2002-11-08 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-10-02 TRNA Transmittal of New Application 3 View
2002-10-02 TRNA Transmittal of New Application 3 View
2002-10-02 SPEC Specification 13 View
2002-10-02 SPEC Specification 13 View
2002-10-02 CLM Claims 4 View
2002-10-02 CLM Claims 4 View
2002-10-02 ABST Abstract 1 View
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2002-10-02 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/262,992
Filed
2002-10-02
Granted
2004-04-13
Pub. No.
US20040023516A1
Art Unit
2812
PTA
-7 days