IP Library › Patent Application 60326893
Patent Application Provisional
App. No. 60/326,893 · Confirmation No. 9221

Passivation methods for improved uniformity and repeatability for atomic layer deposition

Provisional Application Expired
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 Code Description Pages PDF
2001-10-02 TRNA Transmittal of New Application 2 View
2001-10-02 SPEC Specification 6 View
2001-10-02 ABST Abstract 1 View
2001-10-02 DRW Drawings-only black and white line drawings 1 View
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Quick Facts
App. No.
60/326,893
Filed
2001-10-02