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App. No. 10/264,318 · Confirmation No. 4635

POLARIZATION BEAM SPLITTER FOR PHOTOLITHOGRAPHY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-11-25 IFEE Issue Fee Payment (PTO-85B) 4 View
2003-11-25 LET. Miscellaneous Incoming Letter 1 View
2003-11-25 DRW Drawings-only black and white line drawings 11 View
2003-01-17 TRNA Transmittal of New Application 4 View
2003-01-17 A.PE Preliminary Amendment 11 View
2002-10-04 TRNA Transmittal of New Application 3 View
2002-10-04 ADS Application Data Sheet 2 View
2002-10-04 A.PE Preliminary Amendment 16 View
2002-10-04 SPEC Specification 20 View
2002-10-04 CLM Claims 4 View
2002-10-04 ABST Abstract 1 View
2002-10-04 DRW Drawings-only black and white line drawings 11 View
2002-10-04 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/264,318
Filed
2002-10-04
Granted
2004-01-20
Pub. No.
US20030086158A1
Art Unit
2872
PTA
-1 days