IP Library › Granted Patent US 6,794,096
Granted Patent Utility
US 6,794,096 · Confirmation No. 4983

PHASE SHIFTING MASK TOPOGRAPHY EFFECT CORRECTION BASED ON NEAR-FIELD IMAGE PROPERTIES

Inventor: Armen Kroyan
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2004-08-11 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-08-11 1449 List of References cited by applicant and considered by examiner 1 View
2004-07-27 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-05-25 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-25 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-05-25 1449 List of References cited by applicant and considered by examiner 5 View
2004-05-25 892 List of references cited by examiner 1 View
2004-05-25 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-25 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-14 SRNT Examiner's search strategy and results 2 View
2003-12-01 LET. Miscellaneous Incoming Letter 1 View
2003-01-27 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
2003-01-27 FOR Foreign Reference 38 View
2003-01-27 FOR Foreign Reference 27 View
2003-01-27 FOR Foreign Reference 62 View
2002-10-09 TRNA Transmittal of New Application 2 View
2002-10-09 ADS Application Data Sheet 1 View
2002-10-09 SPEC Specification 19 View
2002-10-09 CLM Claims 4 View
2002-10-09 ABST Abstract 1 View
2002-10-09 DRW Drawings-only black and white line drawings 10 View
2002-10-09 OATH Oath or Declaration filed 2 View
2002-10-09 WFEE Fee Worksheet (SB06) 1 View
2002-10-09 WFEE Fee Worksheet (SB06) 1 View
2002-10-09 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
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Quick Facts
Patent No.
US 6,794,096
App. No.
10/268,874
Filed
2002-10-09
Granted
2004-09-21
Pub. No.
US20040073884A1
Art Unit
1756
PTA
0 days