IP Library › Granted Patent US 6,716,558
Granted Patent Utility
US 6,716,558 · Confirmation No. 3456

TRANSPARENT PHASE SHIFT MASK FOR FABRICATION OF SMALL FEATURE SIZES

Inventor: George Talor JR.
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2008-03-27 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-01-23 IFEE Issue Fee Payment (PTO-85B) 3 View
2003-12-04 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-04 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2003-12-04 SPEC Specification 1 View
2003-12-04 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-04 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-10-02 CLM Claims 6 View
2003-10-02 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-10-02 LET. Miscellaneous Incoming Letter 2 View
2003-06-27 CTNF Non-Final Rejection 5 View
2003-06-27 892 List of references cited by examiner 1 View
2003-05-29 C.AD Change of Address 1 View
2003-04-28 LET. Miscellaneous Incoming Letter 4 View
2002-12-27 DRW Drawings-only black and white line drawings 11 View
2002-12-27 LET. Miscellaneous Incoming Letter 3 View
2002-12-27 TRNA Transmittal of New Application 3 View
2002-12-27 DRW Drawings-only black and white line drawings 11 View
2002-12-10 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-11-08 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-11-08 SRFW Search information including classification, databases and other search related notes 1 View
2002-11-08 FWCLM Index of Claims 1 View
2002-11-08 TRNA Transmittal of New Application 4 View
2002-11-08 DRW Drawings-only black and white line drawings 11 View
2002-11-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-11-08 SPEC Specification 1 View
2002-11-08 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2002-11-08 SPEC Specification 28 View
2002-11-08 CLM Claims 5 View
2002-11-08 ABST Abstract 1 View
2002-11-08 OATH Oath or Declaration filed 3 View
2002-11-08 WFEE Fee Worksheet (SB06) 1 View
2002-11-08 WFEE Fee Worksheet (SB06) 1 View
2002-11-08 TRNA Transmittal of New Application 4 View
2002-11-08 A.PE Preliminary Amendment 3 View
2002-11-08 SPEC Specification 28 View
2002-11-08 CLM Claims 5 View
2002-11-08 ABST Abstract 1 View
2002-11-08 DRW Drawings-only black and white line drawings 11 View
2002-11-08 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,716,558
App. No.
10/291,116
Filed
2002-11-08
Granted
2004-04-06
Art Unit
1756
PTA
-5 days