Granted Patent
Utility
US 6,672,946
· Confirmation No. 6992
METHODS AND APPARATUSES FOR MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC-DEVICE SUBSTRATE ASSEMBLIES ON PLANARIZING PADS
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-01-06 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2003-09-22 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-09-22 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2003-09-22 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-07-31 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-07-31 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-11-19 | TRNA |
Transmittal of New Application | 4 | View | |
| 2002-11-19 | ADS |
Application Data Sheet | 2 | View | |
| 2002-11-19 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-11-19 | SPEC |
Specification | 17 | View | |
| 2002-11-19 | CLM |
Claims | 19 | View | |
| 2002-11-19 | ABST |
Abstract | 1 | View | |
| 2002-11-19 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2002-11-19 | OATH |
Oath or Declaration filed | 12 | View |
Inventors
Dinesh Chopra
Boise, ID
Scott G. Meikle
Boise, ID
Attorneys & Agents of Record
Classification
USPC
451/56
B24B37/04
H10P52/403
B24B57/02
Prosecution
- Examiner
- HONG, WILLIAM
- Art Unit
- 3725
- Docket No.
- 500077.11
- Confirmation No.
- 6992
Publication
- Pub. No.
- US20030073389A1
- Pub. Date
- 2003-04-17
Patent Term Adjustment
-3days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,672,946
- App. No.
- 10/300,303
- Filed
- 2002-11-19
- Granted
- 2004-01-06
- Pub. No.
- US20030073389A1
- Examiner
- HONG, WILLIAM
- Art Unit
- 3725
- PTA
- -3 days
External Links