Patent Application
Utility
App. No. 10/300,372
· Confirmation No. 6656
METHODS AND APPARATUSES FOR MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC-DEVICE SUBSTRATE ASSEMBLIES ON PLANARIZING PADS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-03-17 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2002-11-19 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-11-19 | ADS |
Application Data Sheet | 2 | View | |
| 2002-11-19 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-11-19 | SPEC |
Specification | 17 | View | |
| 2002-11-19 | CLM |
Claims | 19 | View | |
| 2002-11-19 | ABST |
Abstract | 1 | View | |
| 2002-11-19 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2002-11-19 | OATH |
Oath or Declaration filed | 12 | View |
Inventors
Dinesh Chopra
Boise, ID
Scott G. Meikle
Boise, ID
Attorneys & Agents of Record
Classification
USPC
451/56
B24B37/04
H10P52/403
B24B57/02
Prosecution
- Examiner
- SELF, SHELLEY M
- Art Unit
- 3731
- Docket No.
- 500077.09
- Confirmation No.
- 6656
Publication
- Pub. No.
- US20030068962A1
- Pub. Date
- 2003-04-10
Patent Term Adjustment
-53days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- App. No.
- 10/300,372
- Filed
- 2002-11-19
- Granted
- 2004-06-08
- Pub. No.
- US20030068962A1
- Examiner
- SELF, SHELLEY M
- Art Unit
- 3731
- PTA
- -53 days
External Links