IP Library › Granted Patent US 6,790,767
Granted Patent Utility Small
US 6,790,767 · Confirmation No. 7521

METHOD FOR FORMATION OF COPPER DIFFUSION BARRIER FILM USING ALUMINUM

Inventor: Jae Suk Lee
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-08-19 BIB Bibliographic Data Sheet 1 View
2004-07-26 IFEE Issue Fee Payment (PTO-85B) 3 View
2004-07-26 C.AD Change of Address 1 View
2004-05-04 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-04 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-04 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-05-04 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 2 View
2004-05-04 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-30 SRNT Examiner's search strategy and results 3 View
2004-03-18 WFEE Fee Worksheet (SB06) 1 View
2004-03-18 FWCLM Index of Claims 1 View
2004-03-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-03-04 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2004-03-04 DRW Drawings-only black and white line drawings 1 View
2004-03-04 XT/ Extension of Time 1 View
2004-03-04 LET. Miscellaneous Incoming Letter 3 View
2004-03-04 SPEC Specification 6 View
2004-03-04 ABST Abstract 1 View
2003-09-29 CTNF Non-Final Rejection 7 View
2003-09-29 892 List of references cited by examiner 1 View
2003-09-08 SRNT Examiner's search strategy and results 1 View
2003-06-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-06-16 SPEC Specification 2 View
2003-06-16 CLM Claims 1 View
2003-06-16 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-03-14 CTNF Non-Final Rejection 5 View
2003-03-14 892 List of references cited by examiner 1 View
2003-03-14 1449 List of References cited by applicant and considered by examiner 1 View
2003-03-11 TRNA Transmittal of New Application 6 View
2003-03-11 LET. Miscellaneous Incoming Letter 3 View
2003-03-07 SRNT Examiner's search strategy and results 2 View
2002-11-27 TRNA Transmittal of New Application 3 View
2002-11-27 SPEC Specification 6 View
2002-11-27 CLM Claims 1 View
2002-11-27 ABST Abstract 1 View
2002-11-27 DRW Drawings-only black and white line drawings 2 View
2002-11-27 OATH Oath or Declaration filed 4 View
2002-11-27 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-11-27 SRFW Search information including classification, databases and other search related notes 1 View
2002-11-27 FWCLM Index of Claims 1 View
2002-11-27 TRNA Transmittal of New Application 3 View
2002-11-27 DRW Drawings-only black and white line drawings 2 View
2002-11-27 SPEC Specification 6 View
2002-11-27 CLM Claims 1 View
2002-11-27 ABST Abstract 1 View
2002-11-27 OATH Oath or Declaration filed 4 View
2002-11-27 WFEE Fee Worksheet (SB06) 1 View
2002-11-27 WFEE Fee Worksheet (SB06) 2 View
2002-11-27 FRPR Certified Copy of Foreign Priority Application 12 View
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Quick Facts
Patent No.
US 6,790,767
App. No.
10/306,491
Filed
2002-11-27
Granted
2004-09-14
Pub. No.
US20030100182A1
Art Unit
2812
PTA
-68 days