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App. No. 10/309,119 · Confirmation No. 6009

SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE, POLISHING SLURRY FEEDER AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

Inventor: Katsuhisa Sakai
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-06-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-12-04 TRNA Transmittal of New Application 2 View
2002-12-04 SPEC Specification 27 View
2002-12-04 CLM Claims 4 View
2002-12-04 ABST Abstract 1 View
2002-12-04 DRW Drawings-only black and white line drawings 8 View
2002-12-04 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/309,119
Filed
2002-12-04
Granted
2004-08-03
Pub. No.
US20030228830A1
Art Unit
3723
PTA
0 days