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App. No. 10/319,758 · Confirmation No. 3165

SYSTEM FOR WAFER CARRIER IN-PROCESS CLEAN AND RINSE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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 Code Description Pages PDF
2003-09-24 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-12-13 TRNA Transmittal of New Application 3 View
2002-12-13 SPEC Specification 27 View
2002-12-13 CLM Claims 7 View
2002-12-13 ABST Abstract 1 View
2002-12-13 DRW Drawings-only black and white line drawings 10 View
2002-12-13 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/319,758
Filed
2002-12-13
Granted
2003-12-09
Art Unit
1746
PTA
-3 days