Patent Assignment
Reel/Frame 013580/0941
Assignment of Assignor's Interest
Recorded: 2002-12-13
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System for Wafer Carrier in-Process Clean and Rinse
Patent:
6,659,116 →
Application:
10/319,758 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.