IP Library › Granted Patent US 6,770,896
Granted Patent Utility
US 6,770,896 · Confirmation No. 4559

METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON A RADIATION-EMITTING PLASMA

Inventor: Guido Schriever
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2004-03-17 892 List of references cited by examiner 1 View
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2004-02-26 SRNT Examiner's search strategy and results 7 View
2004-02-20 WFEE Fee Worksheet (SB06) 1 View
2004-01-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-01-22 CLM Claims 4 View
2004-01-22 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2003-10-22 CTNF Non-Final Rejection 11 View
2003-10-22 1449 List of References cited by applicant and considered by examiner 1 View
2003-10-22 892 List of references cited by examiner 1 View
2003-10-22 FWCLM Index of Claims 1 View
2003-10-22 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-14 SRNT Examiner's search strategy and results 2 View
2003-02-03 TRNA Transmittal of New Application 1 View
2003-02-03 SPEC Specification 8 View
2003-02-03 CLM Claims 2 View
2003-02-03 ABST Abstract 1 View
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2003-02-03 WFEE Fee Worksheet (SB06) 1 View
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2003-02-03 FRPR Certified Copy of Foreign Priority Application 13 View
2003-02-03 TRNA Transmittal of New Application 1 View
2003-02-03 SPEC Specification 8 View
2003-02-03 CLM Claims 2 View
2003-02-03 ABST Abstract 1 View
2003-02-03 DRW Drawings-only black and white line drawings 1 View
2003-02-03 OATH Oath or Declaration filed 1 View
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Quick Facts
Patent No.
US 6,770,896
App. No.
10/357,173
Filed
2003-02-03
Granted
2004-08-03
Pub. No.
US20030146398A1
Art Unit
2881
PTA
0 days