IP Library Granted Patent US 6,709,556
Granted Patent Utility
US 6,709,556 · Confirmation No. 4527

PLASMA PROCESSING APPARATUS

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Code Description Pages PDF
2016-07-05 OATH Oath or Declaration filed 21 View
2015-01-19 OATH Oath or Declaration filed 3 View
2004-02-02 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-02-12 TRNA Transmittal of New Application 4 View
2003-02-12 SPEC Specification 9 View
2003-02-12 CLM Claims 2 View
2003-02-12 ABST Abstract 1 View
2003-02-12 DRW Drawings-only black and white line drawings 1 View
2003-02-12 OATH Oath or Declaration filed 3 View
2003-02-12 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,709,556
App. No.
10/364,343
Filed
2003-02-12
Granted
2004-03-23
Pub. No.
US20030150720A1
Art Unit
1753
PTA
-2 days