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App. No. 10/367,737 · Confirmation No. 3857

METHOD OF FORMING CONDUCTIVE LAYERS IN THE TRENCHES OR THROUGH HOLES MADE IN AN INSULATING FILM ON A SEMICONDUCTOR SUBSTRATE

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2004-03-01 892 List of references cited by examiner 1 View
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2003-02-19 A.PE Preliminary Amendment 2 View
2003-02-19 SPEC Specification 41 View
2003-02-19 CLM Claims 15 View
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Quick Facts
App. No.
10/367,737
Filed
2003-02-19
Granted
2004-08-03
Pub. No.
US20030148600A1
Art Unit
2823
PTA
0 days