IP Library › Granted Patent US 6,782,843
Granted Patent Utility
US 6,782,843 · Confirmation No. 9154

ACTIVELY-COOLED DISTRIBUTION PLATE FOR REDUCING REACTIVE GAS TEMPERATURE IN A PLASMA PROCESSING SYSTEM

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2023-09-21 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2023-09-21 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2023-09-13 R3.73 Assignee showing of ownership per 37 CFR 3.73 — View
2023-09-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-09-13 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2023-09-13 PA.. Power of Attorney 2 View
2023-09-08 N572 Response - Re: Informal Power of Attorney (PTOL-308) 1 View
2023-09-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-09-06 PA.. Power of Attorney 2 View
2005-05-26 COCOUT Certificate of Correction - Post Issue Communication 7 View
2005-01-05 COCIN Request for Certificate of Correction 10 View
2004-07-02 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-05-21 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-21 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-21 CLM Claims 3 View
2004-05-21 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-21 FWCLM Index of Claims 1 View
2004-05-21 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-12 WFEE Fee Worksheet (SB06) 1 View
2004-05-03 A.NE Response After Final Action 1 View
2004-05-03 CLM Claims 3 View
2004-05-03 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-05-03 DIST Terminal Disclaimer Filed 3 View
2004-03-29 CTFR Final Rejection 14 View
2004-03-29 892 List of references cited by examiner 1 View
2004-03-29 FWCLM Index of Claims 1 View
2004-03-29 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-02-13 ABST Abstract 1 View
2004-02-13 CLM Claims 4 View
2004-02-13 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-11-12 CTNF Non-Final Rejection 8 View
2003-11-12 892 List of references cited by examiner 1 View
2003-11-12 1449 List of References cited by applicant and considered by examiner 1 View
2003-11-12 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-12 FWCLM Index of Claims 1 View
2003-10-29 SRNT Examiner's search strategy and results 3 View
2003-04-01 TRNA Transmittal of New Application 2 View
2003-04-01 A.PE Preliminary Amendment 16 View
2003-04-01 SPEC Specification 12 View
2003-04-01 CLM Claims 4 View
2003-04-01 ABST Abstract 1 View
2003-04-01 DRW Drawings-only black and white line drawings 6 View
2003-04-01 OATH Oath or Declaration filed 1 View
2003-04-01 WFEE Fee Worksheet (SB06) 1 View
2003-04-01 WFEE Fee Worksheet (SB06) 1 View
2003-04-01 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-04-01 FOR Foreign Reference 7 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,782,843
App. No.
10/404,510
Filed
2003-04-01
Granted
2004-08-31
Pub. No.
US20030205328A1
Art Unit
1763
PTA
-1 days