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App. No. 10/404,546 · Confirmation No. 6907

PROCESS FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE INCLUDING TREATMENT OF GAS USED IN THE PROCESS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-02-19 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-12-31 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-04-02 TRNA Transmittal of New Application 2 View
2003-04-02 SPEC Specification 60 View
2003-04-02 CLM Claims 2 View
2003-04-02 ABST Abstract 1 View
2003-04-02 DRW Drawings-only black and white line drawings 27 View
2003-04-02 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/404,546
Filed
2003-04-02
Granted
2004-04-20
Pub. No.
US20030203646A1
Examiner
ANYA, IGWE U
Art Unit
2825
PTA
0 days